Title Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vik J. Kapoor, William D. Brown ; [sponsored by the] Dielectic Science and Technology and Electronics Divisions.

Imprint

Pennington, NJ (10 S. Main St., Pennington 08534-2696 : Electrochemical Society), c1994.

Location	Call Number	Status
Monograph Collection	TK7872.T55 S54 1994	AVAILABLE

Description	xiii, 625 p. : ill. ; 24 cm.
Series	Proceedings (Electrochemical Society) ; v. 94-16.
Bibliography	Includes bibliographies and indexes.
Subject(s)	Thin film devices -- Congresses.
	Silicon nitride -- Congresses.
	Silica -- Congresses.
	Electric insulators and insulation -- Thin films -- Congresses.
Alternate Author	Kapoor, Vikram J.
	Brown, William D., 1943-
	Electrochemical Society. Dielectric Science and Technology Division.
	Electrochemical Society. Electronics Division.
Additional Title	Silicon Nitride and Silicon Dioxide Thin Insulating Films
	Silicon Nitride and Silicon Dioxide Thin Insulating Films III
Alternate Title	Silicon Nitride and Silicon Dioxide Thin Insulating Films 3