Title Dielectric material integration for microelectronics / editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society].

Imprint

Pennington, New Jersey : Electrochemical Society, c1998.

Location	Call Number	Status
Monograph Collection	TK7872.D53 .D53 1998	AVAILABLE

Description	x, 366 p. : ill. ; 23 cm.
Series	Proceedings (Electrochemical Society) ; v. 98-3.
Note	"This combined volume ... contains material from 2 symposia of the 193rd meeting of the Electrochemical Society, May 3-8, 1998 ... in San Diego ..."--Preface.
Bibliography	Includes bibliographical references and indexes.
Subject(s)	Dielectrics -- Congresses.
	Microelectronics -- Congresses.
	Electrochemistry -- Congresses.
Alternate Author	Brown, William D., 1943-
	Electrochemical Society. Dielectric Science and Technology Division.
	Electrochemical Society. Electronics Division.
	Electrochemical Society. Meeting (193rd : 1998 : San Diego, California)
	International Symposium on Low and High Dielectric Constant Materials (3rd : 1998 : San Diego, CA)
Related Title	Low and high dielectric constants materials III
	Low and high dielectric constants materials