Title Proceedings of the international symposium on thin film materials, processes, reliability, and applications: thin film processes / editors, G.S. Mathad, M. Meyyappan, M. Engelhardt ; Dielectric Science & Technology, Electronics, and Electrodeposition Divisions [of the Electrochemical Society].

Imprint

Pennington, NJ : Electrochemical Society, c1998.

Location	Call Number	Status
Monograph Collection	TA418.9.T45 P76 1997	AVAILABLE

Description	ix, 370 p. : ill. ; 23 cm.
Series	Proceedings (Electrochemical Society) ; v. 97-30.
Note	"The Symposium ... was held ... in Paris, France, Aug 31-Sep 5, 1997."--Preface.
Bibliography	Includes bibliographical references and indexes.
Subject(s)	Thin films -- Congresses.
Alternate Author	Mathad, G. S.
	Meyyappan, M.
	Engelhardt, M. (Michael)
	Electrochemical Society. Dielectric Science and Technology Division.
	Electrochemical Society. Electronics Division.
	Electrochemical Society. Electrodeposition Division.
Additional Title	Thin film materials, process, reliability, and applications
Alternate Title	Thin film processes