Title Proceedings of the twelfth International Symposium on Plasma Processing / editor G.S. Mathad, assisant editors D. Misra, K.B. Sundaram ; [sponsored by Deilectric Science & Technology and Electronics Divisiobns [of the Electrochemical Society].

Imprint

Pennington, New Jersey : Electrochemical Society. c1998.

Location	Call Number	Status
Monograph Collection	TA2020 .S95 1998	AVAILABLE

Description	viii, 291 p. : ill. ; 23 cm.
Series	Proceedings (Electrochemical Society) ; v 98-4.
Note	Spine title: Plasma processing XI.
	"This proceedings volume contains the papers presented at the twelfth symposium on Plasma Processing ... held as part of the 193rd meeting of the Electrochemical Society, Inc. in San Diego, CA, May 3-8, 1998."--Preface.
Bibliography	Includes bibliographical references and indexes.
Subject(s)	Semiconductors -- Etching -- Congressses.
	Plasma etching -- Congresses.
Alternate Author	Mathad, G. S.
	Misra, Durgamadhab
	Sundaram, K. B.
	Electrochemical Society. Dielectric Science and Technology Division.
	Electrochemical Society. Electronics Division.
	Electrochemical Society. Meeting (193rd : 1998 : San Diego, California)
	International Symposium on Plasma Processing (12th : 1998 : San Diego, California)
Additional Title	Plaxma processing
Alternate Title	Plasma processing XII.