| Title |
Proceedings of the eleventh International Symposium on Plasma Processing / editors G.S. Mathad, M. Meyyappan. |
|
| Imprint |
Pennington, NJ : Electrochemical Society. c1996. |
|
| Description |
xi, 720 p. : ill. ; 23 cm. |
| Series |
Proceedings (Electrochemical Society) ; v 96-12.
|
| Note |
"Dielectric Science and Technology and Electronics Divisions." |
|
Spine title: Plasma processing XI. |
|
"This proceedings volume contains the papers presented at the Eleventh Symposium on Plasma Processing, held in Los Angeles, CA, May 5-10, 1996. ... as part of the 198th Meeting of the Electrochemical Society, Inc., Pennington, NJ."--Preface. |
| Bibliography |
Includes bibliographical references and indexes. |
| Subject(s) |
Semiconductors -- Etching -- Congressses.
|
|
Plasma etching -- Congresses.
|
| Alternate Author |
Mathad, G. S.
|
|
Meyyappan, M.
|
|
Electrochemical Society. Dielectric Science and Technology Division.
|
|
Electrochemical Society. Electronics Division.
|
|
Electrochemical Society. Meeting (189th : 1996 : Los Angeles, California)
|
|
International Symposium on Plasma Processing (11th : 1996 : Los Angeles, California)
|
| Alternate Title |
Plasma processing XI. |
|
