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Conference
Symposium on Plasma Processing (10th : 1994 : San Francisco, Calif.)
Title
Proceedings of the Tenth Symposium on Plasma Processing : May 22-27, 1994 / edited by G.S. Mathad, D.W. Hess.
Imprint
Pennington, NJ : Electrochemical Society. c1994.
Location
Call Number
Status
Monograph Collection
TA2020 .S95 1994
AVAILABLE
Description
xi, 606 p. : ill. ; 23 cm.
Series
Proceedings (Electrochemical Society) ; v. 94-20.
Note
"Dielectric Science and Technology and Electronics Divisions."
Spine title: Plasma processing.
Bibliography
Includes bibliographical references and indexes.
Subject(s)
Semiconductors -- Etching -- Congressses.
Plasma etching -- Congresses.
Alternate Author
Mathad, G. S.
Hess, Dennis W.
Electrochemical Society. Dielectric Science and Technology Division.
Electrochemical Society. Electronics Division.
Alternate Title
Plasma processing.
Additional Title
Plasma processing X
Alternate Title
Plasma processing 10
