Conference Symposium on Plasma Processing (6th : 1986 : San Diego, Calif.)

Title Proceedings of the Sixth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, R.A. Gottscho.

Imprint Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, c1987.
Location Call Number Status
 Monograph Collection  TA2020 .S95 1987  AVAILABLE
Description x, 754 p. : ill. ; 23 cm.
Series Proceedings (Electrochemical Society) ; v. 87-6.
Note Spine title: Plasma processing.
Bibliography Includes bibliographies and indexes.
Subject(s) Plasma engineering -- Congresses.
Alternate Author Mathad, G. S.
Schwartz, G. C.
Gottscho, R. A.
Related Title Plasma processing.