Title Proceedings of the Fifth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.

Imprint

Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, c1985.

Location	Call Number	Status
Monograph Collection	TA2020 .S95 1985	AVAILABLE

Description	x, 619 p. : ill. ; 23 cm.
Series	Proceedings (Electrochemical Society) ; v. 85-1.
Bibliography	Includes bibliographies and indexes.
Subject(s)	Plasma etching -- Congresses.
	Semiconductors -- Etching -- Congresses.
Alternate Author	Mathad, G. S.
	Schwartz, G. C.
	Smolinsky, G.