Title Plasma processing : proceedings of the third Symposium on Plasma Processing / edited by J. Dieleman, R.G. Frieser, G.S. Mathad ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.

Imprint

Pennington, N.J. (10 S. Main St., Pennington 08534) : Electrochemical Society, c1982.

Location	Call Number	Status
Monograph Collection	TA2020 .S95 1981	AVAILABLE

Description	xi, 516 p. : ill. ; 23 cm.
Series	Proceedings (Electrochemical Society) ; v. 82-6.
Bibliography	Includes bibliographical references and indexes.
Subject(s)	Plasma engineering -- Congresses.
Alternate Author	Dieleman, J.
	Frieser, R. G.
	Mathad, G. S.
	Electrochemical Society. Dielectrics and Insulation Division.
	Electrochemical Society. Electronics Division.