Title Plasma etching processes for sub-quarter micron devices : proceedings of the International Symposium / edited by G.S. Mathad ... [et al.] ; Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society].

Imprint

Pennington, New Jersey : Electrochemical Society. c2000.

Location	Call Number	Status
Monograph Collection	TA2020 .P51 1999	AVAILABLE

Description	x, 378 p. : ill. ; 23 cm.
Series	Proceedings (Electrochemical Society) ; v. 99-30.
Note	"This proceedings volume contains the papers presented at the symposium on Plasma Etching Processes for Sub-Quarter Micron Devices. The symposium ... was held in Honolulu, HI, October 17-22, 1999 ..."--Preface.
Bibliography	Includes bibliographic references and indexes.
Subject(s)	Semiconductors -- Etching -- Congressses.
	Plasma etching -- Congresses.
	Sputtering (Physics) -- Congresses.
Alternate Author	Mathad, G. S.
	Electrochemical Society. Dielectric Science and Technology Division.
	Electrochemical Society. Electronics Division.