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Title Plasma reactions and their applications.

Imprint Metals Park, Ohio : ASM International, c1988.
Location Call Number Status
 Monograph Collection  TA2020 .P37 1988  AVAILABLE
Description v, 328 p. : ill. ; 29 cm.
Series Japan materials report.
Bibliography Includes bibliographical references.
Subject(s) Plasma engineering.
Alternate Author Japan Technical Information Service.