Title Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm.

Imprint

Boston : Academic Press, c1989.


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Location	Call Number	Status
Monograph Collection	TA2020 .M36 1989	AVAILABLE

Description	xii, 476 p. : ill. ; 24 cm.
Series	Plasma -- materials interactions
Bibliography	Includes bibliographical references and index.
Subject(s)	Plasma etching.
Alternate Author	Manos, Dennis M.
	Flamm, Daniel L.