Conference Symposium on Plasma Processing (4th : 1983 : San Francisco, Calif.)

Title Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.

Imprint Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, c1983.
Location Call Number Status
 Monograph Collection  TA2005 .S95 1983  AVAILABLE
Description x, 649 p. : ill. ; 23 cm.
Series Proceedings (Electrochemical Society) ; v. 83-10.
Bibliography Includes bibliographical references and indexes.
Subject(s) Plasma engineering -- Congresses.
Alternate Author Mathad, G. S.
Schwartz, G. C.
Smolinsky, G.