Title Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

Imprint

Washington, D.C. : National Academy Press, 1991.

Location	Call Number	Status
Monograph Collection	TA2005 .N37 1991	AVAILABLE

Description	xii, 75 p. : ill. ; 28 cm.
Subject(s)	Plasma engineering.
	Microelectronics -- Materials -- Effect of radiation on.
	Surfaces (Technology)