Title Proceedings of the First International Symposium on Advanced Materials for ULSI / edited by Martin Scott, Yoichi Akasaka, Rafael Reif.

Imprint

Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, c1988.

Location	Call Number	Status
Monograph Collection	TK7874 .I47 1988	AVAILABLE

Description	vi, 246 p. : ill. ; 23 cm.
Series	Proceedings (Electrochemical Society) ; v. 88-19.
Note	"[Sponsored by] Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions [of the Electrochemical Society]".
Bibliography	Includes bibliographies and index.
Subject(s)	Integrated circuits -- Ultra large scale integration -- Congresses.
Alternate Author	Scott, Martin (Martin P.)
	Akasaka, Yoichi.
	Reif, Rafael.
	Electrochemical Society. Electronics Division.
	Electrochemical Society. Dielectrics and Insulation Division.
	Electrochemical Society. High Temperature Materials Division.
Related Title	Advanced materials for ULSI.