Title Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA / edited by David F. Kyser [and others] ; managing editor, Daniel Halibey.

Imprint	AMF O'Hare [Chicago], IL : Scanning Electron Microscopy, Inc., 1984
	©1984

Location	Call Number	Status
Folio	QC176.8.R3 P44 1982	AVAILABLE

Description	xii, 372 pages: illustrations; 29 cm
Content	text txt
Media	unmediated n
Carrier	volume nc
Bibliography	Includes bibliographical references and indexes.
Subject(s)	Solids -- Effect of radiation on -- Congresses.
	Electron beams -- Congresses.
	Electrons -- Backscattering -- Congresses.
	Backscattering -- Congresses.
	Microlithography -- Congresses.
	Electron energy loss spectroscopy -- Congresses.
Alternate Author	Kyser, David F.